publication . Article . 2005
Fabrication of micromirrors with pyramidal shape using anisotropic etching of silicon
Moktadir, Z.; Vijaya Prakash, G.; Trupke, M.; Koukharenko, E.; Kraft, M.; Baumberg, J.J.; Eriksson, S.; Hinds, E.A.;
Open Access English
- Published: 01 Jan 2005
- Country: United Kingdom
Download from