publication . Part of book or chapter of book . Article . 2006

CCD Development Progress at Lawrence Berkeley National Laboratory

William F. Kolbe; Steve Holland; Chris Bebek;
Open Access
  • Published: 01 Jan 2006
  • Publisher: Springer Netherlands
  • Country: United States
Abstract
Author(s): Kolbe, W.F.; Holland, S.E.; Bebek, C.J. | Abstract: P-channel CCD imagers, 200-300um thick, fully depleted, and back-illuminat ed are being developed for scientific applications including ground- and space-based astronomy and x-ray detection. These thick devices have extended IR response, good point-spread function (PSF) and excellent radiation tolerance. Initially, these CCDs were made in-house at LBNL using 100 mm diameter wafers. Fabrication on high-resistivity 150 mm wafers is now proceeding according to a model in which the wafers are first processed at DALSA Semiconductor up to the Al contact mask step. They are then thinned and the rest of the ...
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Subjects
free text keywords: fully-depleted back-illuminated p-channel IR response high voltage PSF, Point spread function, National laboratory, Wafer, Semiconductor, business.industry, business, Biasing, Charge transfer efficiency, Electrical engineering, Optoelectronics, Fabrication, Engineering, Radiation tolerance
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