publication . Part of book or chapter of book . Article . 2006

CCD Development Progress at Lawrence Berkeley National Laboratory

William F. Kolbe; Steve Holland; Chris Bebek;
Open Access
  • Published: 01 Jan 2006
  • Publisher: Springer Netherlands
  • Country: United States
Author(s): Kolbe, W.F.; Holland, S.E.; Bebek, C.J. | Abstract: P-channel CCD imagers, 200-300um thick, fully depleted, and back-illuminat ed are being developed for scientific applications including ground- and space-based astronomy and x-ray detection. These thick devices have extended IR response, good point-spread function (PSF) and excellent radiation tolerance. Initially, these CCDs were made in-house at LBNL using 100 mm diameter wafers. Fabrication on high-resistivity 150 mm wafers is now proceeding according to a model in which the wafers are first processed at DALSA Semiconductor up to the Al contact mask step. They are then thinned and the rest of the ...
Persistent Identifiers
free text keywords: fully-depleted back-illuminated p-channel IR response high voltage PSF, Point spread function, National laboratory, Wafer, Semiconductor, business.industry, business, Biasing, Charge transfer efficiency, Electrical engineering, Optoelectronics, Fabrication, Engineering, Radiation tolerance
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