Modeling and Selection for Real-time Wafer-to-Wafer Fault Detection Applications

Doctoral thesis English OPEN
Baek, Jae Yeon;
(2015)
  • Publisher: eScholarship, University of California
  • Subject: Electrical engineering | Computer science | Data Mining | Machine Learning | Metrology | Scatterometry | Semiconductor Manufacturing | Support Vector Machines

The semiconductor manufacturing industry currently faces many challenges in terms of metrology and process control. With the delay of EUV and the advent of high aspect-ratio 3D structures, there is an increase both the number of complex processing steps and systematic/r... View more
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