Polymer-Ceramic MEMS Bimorphs as Thermal Infrared Sensors

Doctoral thesis English OPEN
Warren, Clinton Gregory;
  • Publisher: eScholarship, University of California
  • Subject: Engineering, Mechanical | Engineering, Electronics and Electrical | Bimorph | Infrared | MEMS | Polymer | Sensors | Uncooled

Thermal infrared detectors based on MEMS bimorph beams have the potential to exceed the performance of current uncooled thermal infrared cameras both in terms of sensitivity and cost. These cameras are part of a rapidly growing industry are used for a vast array of app... View more
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