Lamb wave propagation in monocrystalline silicon wafers

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Fromme, P. ; Pizzolato, M. ; Robyr, J-L ; Masserey, B. (2018)

Monocrystalline silicon wafers are widely used in the photovoltaic industry for solar panels with high conversion efficiency. Guided ultrasonic waves offer the potential to efficiently detect micro-cracks in the thin wafers. Previous studies of ultrasonic wave propagati... View more
  • References (29)
    29 references, page 1 of 3

    1 A. Luque and S. Hegedus, Handbook of Photovoltaic Science and Engineering, (Wiley, West Sussex, 2011), pp. 239-240.

    2 A. Belyaev, O. Polupan, S. Ostapenko, D.P. Hess, and J. P. Kalejs, “Resonance ultrasonic vibration diagnostics of elastic stress in full-size silicon wafers,” Semicond. Sci. Technol. 21, 254-260 (2006).

    3 A. Belyaev, O. Polupan, W. Dallas, S. Ostapenko, D. Hess, and J. Wohlgemuth, “Crack detection and analyses using resonance ultrasonic vibrations in full-size crystalline silicon wafers,” Appl. Phys. Lett. 88, 111907-111909 (2006).

    4 M.J. Padiyar, S.K. Chakrapani, C. V. Krishnamurthy, and K. Balasubramaniam, “Crack detection in polycrystalline silicon wafers using air-coupled ultrasonic guided waves,” in Proceedings of the National Seminar & Exhibition on Non-Destructive Evaluation (NDE 2009, Dec. 10-12, 2009), pp. 341-345.

    5 S.K. Chakrapani, M.J. Padiyar, and K. Balasubramaniam, “Crack detection in full size Czsilicon wafers using Lamb wave air coupled ultrasonic testing (LAC-UT),” J. Nondestr. Eval. 31, 46-55 (2012).

    6 M.-K. Song, K.-Y. Jhang, “Crack Detection in Single-Crystalline Silicon Wafer Using Laser Generated Lamb Wave,” Adv. Mater. Sci. Eng. 2013, 950791 (2013).

    7 D. E. Chimenti, “Guided waves in plates and their use in materials characterization,” Appl. Mech. Rev. 50, 247-284 (1997).

    8 P. Cawley, M.J.S. Lowe, D.N. Alleyne, B. Pavlakovic, and P.D. Wilcox, “Practical long range guided wave testing: applications to pipes and rail,” Mater. Eval. 61, 66-74 (2003).

    9 J.L. Rose, “Standing on the shoulders of giants: An example of guided wave inspection,” Mater. Eval. 60, 53-59 (2002).

    10 B. Masserey and P. Fromme, “On the reflection of coupled Rayleigh-like waves at surface defects in plates,” J. Acoust. Soc. Am. 123, 88-98 (2008).

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