publication . Other literature type . Article . 2018

Lamb wave propagation in monocrystalline silicon wafers

B. Masserey; Jean-Luc Robyr; Marco Pizzolato; Paul Fromme;
Open Access English
  • Published: 17 Oct 2018
Monocrystalline silicon wafers are widely used in the photovoltaic industry for solar panels with high conversion efficiency. Guided ultrasonic waves offer the potential to efficiently detect micro-cracks in the thin wafers. Previous studies of ultrasonic wave propagation in silicon focused on effects of material anisotropy on bulk ultrasonic waves, but the dependence of the wave propagation characteristics on the material anisotropy is not well understood for Lamb waves. The phase slowness and beam skewing of the two fundamental Lamb wave modes A0 and S0 were investigated. Experimental measurements using contact wedge transducer excitation and laser measurement...
free text keywords: Ingénierie, Acoustics and Ultrasonics, Arts and Humanities (miscellaneous), Monocrystalline silicon, Lamb waves, Ultrasonic sensor, Silicon, chemistry.chemical_element, chemistry, Anisotropy, Slowness, Beam (structure), Optics, business.industry, business, Guided wave testing, Materials science
29 references, page 1 of 2

1 A. Luque and S. Hegedus, Handbook of Photovoltaic Science and Engineering, (Wiley, West Sussex, 2011), pp. 239-240.

2 A. Belyaev, O. Polupan, S. Ostapenko, D.P. Hess, and J. P. Kalejs, “Resonance ultrasonic vibration diagnostics of elastic stress in full-size silicon wafers,” Semicond. Sci. Technol. 21, 254-260 (2006). [OpenAIRE]

3 A. Belyaev, O. Polupan, W. Dallas, S. Ostapenko, D. Hess, and J. Wohlgemuth, “Crack detection and analyses using resonance ultrasonic vibrations in full-size crystalline silicon wafers,” Appl. Phys. Lett. 88, 111907-111909 (2006).

4 M.J. Padiyar, S.K. Chakrapani, C. V. Krishnamurthy, and K. Balasubramaniam, “Crack detection in polycrystalline silicon wafers using air-coupled ultrasonic guided waves,” in Proceedings of the National Seminar & Exhibition on Non-Destructive Evaluation (NDE 2009, Dec. 10-12, 2009), pp. 341-345.

5 S.K. Chakrapani, M.J. Padiyar, and K. Balasubramaniam, “Crack detection in full size Czsilicon wafers using Lamb wave air coupled ultrasonic testing (LAC-UT),” J. Nondestr. Eval. 31, 46-55 (2012).

6 M.-K. Song, K.-Y. Jhang, “Crack Detection in Single-Crystalline Silicon Wafer Using Laser Generated Lamb Wave,” Adv. Mater. Sci. Eng. 2013, 950791 (2013).

7 D. E. Chimenti, “Guided waves in plates and their use in materials characterization,” Appl. Mech. Rev. 50, 247-284 (1997).

8 P. Cawley, M.J.S. Lowe, D.N. Alleyne, B. Pavlakovic, and P.D. Wilcox, “Practical long range guided wave testing: applications to pipes and rail,” Mater. Eval. 61, 66-74 (2003). [OpenAIRE]

9 J.L. Rose, “Standing on the shoulders of giants: An example of guided wave inspection,” Mater. Eval. 60, 53-59 (2002).

10 B. Masserey and P. Fromme, “On the reflection of coupled Rayleigh-like waves at surface defects in plates,” J. Acoust. Soc. Am. 123, 88-98 (2008). [OpenAIRE]

11 B. Masserey and P. Fromme, “In-situ monitoring of fatigue crack growth using high frequency guided waves,” NDT&E Int. 71, 1-7 (2015). [OpenAIRE]

12 B. Chapuis, N. Terrien, D. Royer, “Excitation and focusing of Lamb waves in a multilayered anisotropic plate,” J. Acoust. Soc. Am. 127, 198-203 (2010).

13 A. Karmazin, E. Kirillova, W. Seemann and P.Syromyatnikov, “A study of time harmonic guided Lamb waves and their caustics in composite plates,” Ultrasonics 53, 283-293 (2013).

14 A. Leleux, P. Micheau and M. Castaings, “Long Range Detection of Defects in Composite Plates Using Lamb Waves Generated and Detected by Ultrasonic Phased Array Probes,” J. Nondestruct. Eval. 32, 200-214 (2013). [OpenAIRE]

15 C. Potel, S. Baly, J.-F. de Belleval, M. Lowe and P. Gatignol, “Deviation of a monochromatic Lamb wave beam in anisotropic multilayered media: asymptotic analysis, numerical and experimental results,” IEEE Trans. Ultrason. Ferroel. Freq. Contr. 52, 987- 1001 (2005). [OpenAIRE]

29 references, page 1 of 2
Any information missing or wrong?Report an Issue