publication . Article . 2007

Fabrication of flexible thermoelectric microcoolers using planar thin-film technologies

Gonçalves, L. M.; Rocha, J. G.; Couto, Carlos; Alpuim, P.; Min, Gao; Rowe, D. M.; Correia, J. H.;
Open Access
  • Published: 01 Jul 2007 Journal: Journal of Micromechanics and Microengineering, volume 17, pages S168-S173 (issn: 0960-1317, eissn: 1361-6439, Copyright policy)
  • Publisher: IOP Publishing
  • Country: Brazil
Abstract
The present work reports on the fabrication and characterization of a planar Peltier cooler on a flexible substrate. The device was fabricated on a 12 νm thick Kapton(c) polyimide substrate using Bi2Te3 and Sb2Te3 thermoelectric elements deposited by thermal co-evaporation. The cold area of the device is cooled with four thermoelectric junctions, connected in series using metal contacts. Plastic substrates add uncommon mechanical properties to the composite film-substrate and enable integration with novel types of flexible electronic devices. Films were deposited by co-evaporation of tellurium and bismuth or antimony to obtain Bi2Te3 or Sb2Te3, respectively. Pat...
Subjects
free text keywords: Peltier, Flexible, Science & Technology, Mechanical Engineering, Electrical and Electronic Engineering, Mechanics of Materials, Electronic, Optical and Magnetic Materials, Fabrication, Thermoelectric materials, Thermoelectric cooling, Thermoelectric effect, Materials science, Thin film, Kapton, Bismuth, chemistry.chemical_element, chemistry, Electronic engineering, Tellurium
Related Organizations
Funded by
FCT| SFRH/BD/18142/2004
Project
SFRH/BD/18142/2004
MICROPIRÓMETRO AUTOCALIBRÁVEL EM SILÍCIO
  • Funder: Fundação para a Ciência e a Tecnologia, I.P. (FCT)
  • Project Code: SFRH/BD/18142/2004
  • Funding stream: SFRH | Doutoramento

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