Wet-cleaning of MgO(001): Modification of surface chemistry and effects on thin film growth investigated by x-ray photoelectron spectroscopy and time-of-flight secondary ion mass spectroscopy

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Le Febvrier, Arnaud; Jensen, Jens; Eklund, Per;
  • Publisher: A V S AMER INST PHYSICS
  • Related identifiers: doi: 10.1116/1.4975595
  • Subject: Materials Chemistry | Materialkemi

The effect of the wet-cleaning process using solvents and detergent on the surface chemistry of MgO(001) substrate for film deposition was investigated. Six different wet-cleaning processes using solvent and detergent were compared. The effect on film growth was studied... View more
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