publication . Master thesis . 2012

Me-Si-C (Me= Nb, Ti or Zr) : Nanocomposite and Amorphous Thin Films

Tengstrand, Olof;
Open Access English
  • Published: 01 Jan 2012
  • Publisher: Linköpings universitet, Tunnfilmsfysik
  • Country: Sweden
This thesis investigates thin films of the transition metal carbide systems Ti-Si-C, Nb-Si-C, and Zr-Si-C, deposited at a low substrate temperature (350 °C) with dc magnetron sputtering in an Ar discharge. Both the electrical and mechanical properties of these systems are highly affected by their structure. For Nb-Si-C, both the ternary Nb-Si-C and the binary Nb-C are studied. I show pure NbC films to consist of crystalline NbC grains embedded in a matrix of amorphous carbon. The best combination of hardness and electrical resistivity are for ~15 at.% a-C phase. The properties of nc-NbC/a-C are similar to films consisting of nc-TiC/a-C. I further show that in a ...
free text keywords: Natural Sciences, Naturvetenskap
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