Me-Si-C (Me= Nb, Ti or Zr) : Nanocomposite and Amorphous Thin Films

Master thesis English OPEN
Tengstrand, Olof;
  • Publisher: Linköping

This thesis investigates thin films of the transition metal carbide systems Ti-Si-C, Nb-Si-C, and Zr-Si-C, deposited at a low substrate temperature (350 °C) with dc magnetron sputtering in an Ar discharge. Both the electrical and mechanical properties of these systems a... View more
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