publication . Master thesis . 2012

Me-Si-C (Me= Nb, Ti or Zr) : Nanocomposite and Amorphous Thin Films

Tengstrand, Olof;
Open Access English
  • Published: 01 Jan 2012
  • Publisher: Linköpings universitet, Tunnfilmsfysik
  • Country: Sweden
Abstract
This thesis investigates thin films of the transition metal carbide systems Ti-Si-C, Nb-Si-C, and Zr-Si-C, deposited at a low substrate temperature (350 °C) with dc magnetron sputtering in an Ar discharge. Both the electrical and mechanical properties of these systems are highly affected by their structure. For Nb-Si-C, both the ternary Nb-Si-C and the binary Nb-C are studied. I show pure NbC films to consist of crystalline NbC grains embedded in a matrix of amorphous carbon. The best combination of hardness and electrical resistivity are for ~15 at.% a-C phase. The properties of nc-NbC/a-C are similar to films consisting of nc-TiC/a-C. I further show that in a ...
Subjects
free text keywords: Natural Sciences, Naturvetenskap
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[1] M. Ohring, Materials science of thin films, 2nd ed., Academic press, (2002) [OpenAIRE]

[2] P. M. Martinn, Handbook of deposition technologies for films and coatings: science, applications and technology, 3rd ed., Elsevier Science, (2010)

[3] F.F. Chen, Introduction to plasma physics and controlled fusionVolume 1: Plasma physics, 2nd ed., Plenum Press, (1984)

[4] J.F. O'Hanlon, A user's guide to vacuum technology, 3rd ed., John Wiley & Sons, (2003)

[5] I. Petrov, L. Hultman, J.E. Greene, Microstructural evolution during film growth, J. Vac. Sci. Technol. A 21(5) (2003) 117-128

[1] R. Brydson, Aberration-corrected analytical transmission electron microscopy, John Wiley & Sons, (2011)

[2] E. Lewin, M. Gorgoi, F. Schäfers, S. Svensson, U. Jansson, Influence of sputter damage on the XPS analysis of metastable nanocomposite coatings, Surface & Coatings Technology 204 (2009) 455-462 [OpenAIRE]

[3] S.D. Walk, J.P. McCaffrey, The small angle cleavage technique applied to coatings and thin films, Thin Solid Films 308-309 (1997) 399-405

[4] J.P. McCaffrey, Small-angle cleavage of semiconductors for transmission electron microscopy, Ultramicroscopy 38 (1991) 149-157 glasses: Atomic structure, crystallization mechanism and stability of an amorphous phase under irradiation, Journal of Non-Crystalline Solids 358 (2012) 502-518

[5] C. Kittel, Introduction to solid state physics 8th ed., John Wiley & Sons, (2005) [6]. B.D. Cullity, Elements of X-ray diffraction, Addison-Wesley (1956)

[7] M. Birkholz, Thin film analysis by X-ray scattering, John Wiley & Sons, (2009)

[8] W.G. Sloof, R Delhez, Th.H. de Keijser, E.J. Mittemeijer, Development and partial relaxation of internal stresses in thin TiC layers chemically vapour deposited on Fe-C substrates J. Mater. Sci. 22 (1987), 1701-1706

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