Influence of ion bombardment on microcrystalline silicon material quality and solar cell performances

Other literature type English OPEN
Bugnon, G; Feltrin, A; Sculati-Meillaud, F; Bailat, J; Ballif, C;

Microcrystalline hydrogenated silicon growth with VHF-PECVD was examined in an industrial type parallel plate KAITM reactor. The influence of pressure on material quality was studied in single junction solar cells. Solar cells with their intrinsic layer prepared at high... View more
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