Simulation of atomistic processes during silicon oxidation

Doctoral thesis English OPEN
Bongiorno, Angelo (2003)

Silicon dioxide (SiO2) films grown on silicon monocrystal (Si) substrates form the gate oxides in current Si-based microelectronics devices. The understanding at the atomic scale of both the silicon oxidation process and the properties of the Si(100)-SiO2 interface is o... View more
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