Low power high growth rate deposition of microcrystalline silicon

Other literature type English OPEN
Feltrin, A; Bugnon, G; Meillaud, F; Bailat, J; Ballif, C;
  • Subject: Thin Film Solar Cell | Micro Crystalline Si | High Deposition Rate

Microcrystalline growth regimes and solar cells obtained in different pressure and silane depletion conditions are studied in a large area KAI-S plasma reactor. The microcrystalline material quality is systematically investigated by Fourier Transform Photocurrent Spectr... View more
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