publication . Article . Other literature type . 2016
Interface Engineering for Atomic Layer Deposited Alumina Gate Dielectric on SiGe Substrates
Joseph C. Woicik; Yuzheng Guo; Kechao Tang; Majeed A. Foad; John Robertson; Vinayak Vishwanath Hassan; Piero Pianetta; Paul C. McIntyre; Liangliang Zhang;
Open Access
- Published: 12 Jul 2016 Journal: ACS Applied Materials & Interfaces, volume 8, pages 19,110-19,118 (issn: 1944-8244, eissn: 1944-8252,
Copyright policy)
- Publisher: American Chemical Society (ACS)
- Country: United Kingdom
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publication . Article . Other literature type . 2016
Interface Engineering for Atomic Layer Deposited Alumina Gate Dielectric on SiGe Substrates
Joseph C. Woicik; Yuzheng Guo; Kechao Tang; Majeed A. Foad; John Robertson; Vinayak Vishwanath Hassan; Piero Pianetta; Paul C. McIntyre; Liangliang Zhang;