Tuning the Bias Sensing Layer: A New Way to Greatly Improve Metal-Oxide Gas Sensors Selectivity

Conference object English OPEN
Dufour, Nicolas; Chapelle, Audrey; Talhi, Chabane; Blanc, Frédéric; Franc, Bernard; Menini, Philippe; Aguir, Khalifa;
  • Publisher: HAL CCSD
  • Subject: Temperature-modulated | Bias-modulated | [SPI.TRON]Engineering Sciences [physics]/Electronics | Metal Oxide | Gas Senso

International audience; The effects of bias current in the sensing layer of resistive Metal-Oxide (MOX) sensors toward gases have been investigated. The behavior of a WO3 thin film deposited by sputtering has been studied. In a first time, while the working temperature ... View more
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