publication . Article . Conference object . 2016
Deposition of the low resistive ITO-films by means of reactive magnetron sputtering of the In/Sn target on the cold substrate
Y S Zhidik; P E Troyan; D V Korzhenko; E V Baturina; Y N Yurjev;
Open Access
- Published: 01 Jan 2016 Journal: IOP Conference Series: Materials Science and Engineering, volume 135, page 12,055 (issn: 1757-8981, eissn: 1757-899X,
Copyright policy)
- Publisher: IOP Publishing
- Country: Russian Federation
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publication . Article . Conference object . 2016
Deposition of the low resistive ITO-films by means of reactive magnetron sputtering of the In/Sn target on the cold substrate
Y S Zhidik; P E Troyan; D V Korzhenko; E V Baturina; Y N Yurjev;