Анализ возможностей магнетронных распылительных систем для высокоскоростного осаждения функциональных покрытий
Анализ возможностей магнетронных распылительных систем для высокоскоростного осаждения функциональных покрытий
The mechanisms leading to a noticeable increase in the rate of the surface erosion of liquid metal targets sputtered in the plasma of magnetron sputtering systems are studied. Experimental studies of the growth rate of metal coatings during the operation of magnetrons with liquid-phase targets have been carried out. The calculated results and experimental data are in good agreement, which indicates the correctness of the formulated physical concepts and the obtained regularities.
- Tomsk Polytechnic University Russian Federation
плазма, магнетронные распылительные системы, магнетроны, жидкометаллические мишени, функциональные покрытия, металлические покрытия, высокоскоростное осаждение, эрозия
плазма, магнетронные распылительные системы, магнетроны, жидкометаллические мишени, функциональные покрытия, металлические покрытия, высокоскоростное осаждение, эрозия
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