publication . Conference object . 2013

Tuning the Bias Sensing Layer: A New Way to Greatly Improve Metal-Oxide Gas Sensors Selectivity

Dufour, Nicolas; Chapelle, Audrey; Talhi, Chabane; Blanc, Frédéric; Franc, Bernard; Menini, Philippe; Aguir, Khalifa;
Open Access English
  • Published: 03 Dec 2013
  • Publisher: HAL CCSD
  • Country: France
Abstract
International audience; The effects of bias current in the sensing layer of resistive Metal-Oxide (MOX) sensors toward gases have been investigated. The behavior of a WO3 thin film deposited by sputtering has been studied. In a first time, while the working temperature is kept constant, it has been found that tuning the polarization of the MOX layer induces changes on its sensitivity. Besides, the behavior of sensitivity versus bias current depends on the nature of the gas. For example, the response to NH3-10ppm hugely increases with the bias rise; at the opposite, the polarization has no effect on NO2-10ppm responses. In a second time, the effect of the working...
Subjects
free text keywords: Gas Senso, Metal Oxide, Temperature-modulated, Bias-modulated, [ SPI.TRON ] Engineering Sciences [physics]/Electronics, [SPI.TRON]Engineering Sciences [physics]/Electronics

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