publication . Conference object . 2015

Stability aspects of hydrogen-doped indium oxide

Jost, Gabrielle; Hamri, Alexander Nordin; Köhler, Florian; Hüpkes, Jürgen;
Open Access English
  • Published: 01 Jan 2015
  • Country: Germany
Transparent conductive oxides play an important role as contact layers in various opto-electronic devices such as solar cells or LEDs. Whilst crystalline materials e.g. zinc oxide (ZnO), tin oxide (Sn2O3) or tin doped indium oxide (ITO) have already been vastly investigated and applied [1] hydrogen doped indium oxide (In2O3:H) entered the scene a while ago as a new material with a superior trade-off between electrical and optical performance. In2O3:H is commonly deposited at room temperature via sputter deposition using an In2O3 target and water vapor as hydrogen source [2]. Its initial state is amorphous and provides good TCO properties. However, a short anneal...
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