publication . Other literature type . Article . 2014

Discrete microfluidics based on aluminum nitride surface acoustic wave devices

Hua-Feng Pang; Stewart Smith; Richard, Yong Qing FU; Enrique Iborra;
Open Access
  • Published: 14 Jul 2014
  • Publisher: Springer Science and Business Media LLC
  • Country: United Kingdom
To date, most surface acoustic wave (SAW) devices have been made from bulk piezoelectric materials, such as quartz, lithium niobate or lithium tantalite. These bulk materials are brittle, less easily integrated with electronics for control and signal processing, and difficult to realize multiple wave modes or apply complex electrode designs. Using thin film SAWs makes it convenient to integrate microelectronics and multiple sensing or microfluidics techniques into a lab-on-a-chip with low cost and multi-functions on various substrates (silicon, glass or polymer). In the work, aluminum nitride (AlN)-based SAW devices were fabricated and characterized for discrete...
free text keywords: Surface acoustic wave, SAW, AlN film, Microfluidic, Streaming, Materials Chemistry, Electronic, Optical and Magnetic Materials, Condensed Matter Physics
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