Mathematical Model of Plasma Space for Electronic Technologies

Article Russian OPEN
N.N. Chernyshov; K.T. Umyarov; D.V. Pisarenko;
  • Publisher: Харьковский национальный университет радиоэлектроники
  • Journal: Радиоэлектроника и информатика (issn: 1563-0064)
  • Publisher copyright policies & self-archiving

The paper is devoted to studying the plasma used in technologies of the electronic industry. It gives the characteristic of plasma space on the basis of a system of Maxwell-Boltzmann equa-tions. Solving these equations is represented in the form of Fourier transformatio... View more
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