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Об исследовании возможности создания инерциальных модулей на основе отечественных технологий объемной микромеханики

Об исследовании возможности создания инерциальных модулей на основе отечественных технологий объемной микромеханики

Abstract

Эффективность решения задач навигации подвижных объектов в значительной степени зависит от качества инерциальных модулей, в состав которых входят акселерометры и датчики угловой скорости. В бесплатформенных инерциальных системах выходной сигнал акселерометров подвергается двойному интегрированию для определения скорости и координат. При этом информацию о направлении ускорения получают от датчиков угловой скорости, обеспечивающих для акселерометров опорную систему координат. В настоящее время актуальны исследования и разработки микромеханических инерциальных модулей, обеспечивающих существенное улучшение массогабаритных и энергетических характеристик навигационных систем. Рассмотрены конструктивно-технологические особенности их реализации.

Efficiency of solving moving craft navigation problems mostly depends on the quality of inertial measuring cells comprising accelerometers and angular velocity sensors. In platformless inertial systems to determine velocity and coordinates accelerometer output signal is double integrated. Acceleration direction data at that is received from angular velocity sensors providing reference frame for accelerometers. Currently urgent are investigations and developments of micromechanical inertial measuring cells providing essential improvement of mass-dimensional and energy characteristics of navigation systems. The paper deals with structural and technological peculiarities of their realization.

Keywords

МИКРОМЕХАНИЧЕСКИЕ ИНЕРЦИАЛЬНЫЕ ИЗМЕРИТЕЛЬНЫЕ МОДУЛИ, МИКРОМЕХАНИЧЕСКИЕ ДАТЧИКИ УГЛОВОЙ СКОРОСТИ, МИКРОМЕХАНИЧЕСКИЕ АКСЕЛЕРОМЕТРЫ, БЕСПЛАТФОРМЕННЫЕ ИНЕРЦИАЛЬНЫЕ НАВИГАЦИОННЫЕ СИСТЕМЫ, ТЕХНОЛОГИИ ОБЪЕМНОЙ МИКРОМЕХАНИКИ, МЭМС-ТЕХНОЛОГИИ, СБИС

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selected citations
These citations are derived from selected sources.
This is an alternative to the "Influence" indicator, which also reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Citations provided by BIP!
popularity
This indicator reflects the "current" impact/attention (the "hype") of an article in the research community at large, based on the underlying citation network.
BIP!Popularity provided by BIP!
influence
This indicator reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Influence provided by BIP!
impulse
This indicator reflects the initial momentum of an article directly after its publication, based on the underlying citation network.
BIP!Impulse provided by BIP!
0
Average
Average
Average
gold