Deposition Rate and Energy Enhancements of TiN Thin-Film in a Magnetized Sheet Plasma Source

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Hamdi Muhyuddin D. Barra; Henry J. Ramos;
(2011)

Titanium nitride (TiN) has been synthesized using the sheet plasma negative ion source (SPNIS). The parameters used for its effective synthesis has been determined from previous experiments and studies. In this study, further enhancement of the deposition ra... View more
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