publication . Article . Other literature type . 2011

Deposition Rate And Energy Enhancements Of Tin Thin-Film In A Magnetized Sheet Plasma Source

Barra, Hamdi Muhyuddin D.; Ramos, Henry J.;
Open Access en
  • Published: 25 Feb 2011
  • Publisher: Zenodo
Abstract
Titanium nitride (TiN) has been synthesized using the sheet plasma negative ion source (SPNIS). The parameters used for its effective synthesis has been determined from previous experiments and studies. In this study, further enhancement of the deposition rate of TiN synthesis and advancement of the SPNIS operation is presented. This is primarily achieved by the addition of Sm-Co permanent magnets and a modification of the configuration in the TiN deposition process. The magnetic enhancement is aimed at optimizing the sputtering rate and the sputtering yield of the process. The Sm-Co permanent magnets are placed below the Ti target for...
Subjects
free text keywords: Titanium nitride., Chemical vapor deposition, Thin-film synthesis, Magnetized sheetplasma
Download fromView all 3 versions
ZENODO
Article . 2011
Provider: ZENODO
http://dx.doi.org/10.5281/zeno...
Other literature type . 2011
Provider: Datacite
Powered by OpenAIRE Open Research Graph
Any information missing or wrong?Report an Issue
publication . Article . Other literature type . 2011

Deposition Rate And Energy Enhancements Of Tin Thin-Film In A Magnetized Sheet Plasma Source

Barra, Hamdi Muhyuddin D.; Ramos, Henry J.;