publication . Conference object . 2020

SUMCASTEC_200804_Highly Sensitive Capacitive Sensor Based on Injection Locked Oscillators with ppm Sensing Resolution

Meissa Babay; Clement Hallepee; Claire Dalmay; Bruno Barelaud; Emre Can Durmaz; Canan Baristiran Kaynak; Mehmet Kaynak; David Cordeau; Arnaud POTHIER;
Open Access English
  • Published: 04 Aug 2020
Abstract
This paper presents the design and the implementation of an ultra-sensitive capacitive sensor based on an injection-locked oscillator architecture able to achieve ppm sensing resolution. The proposed RF IC chip, implemented on a BiCMOS SiGe 0.25 μm technology, is able to detect capacitance changes in the range of few attoF, induced by dielectric disturbance occurring on on-chip integrated sensing capacitors. Indeed, this paper demonstrates that, once locked on a 4.693 GHz and -50 dBm injection signal, the proposed sensing system can efficiently detect differences of free running frequencies as low as 10 kHz between two oscillators. Considering a differential mea...
Subjects
ACM Computing Classification System: Hardware_INTEGRATEDCIRCUITSHardware_PERFORMANCEANDRELIABILITY
Funded by
EC| SUMCASTEC
Project
SUMCASTEC
Semiconductor-based Ultrawideband Micromanipulation of CAncer STEm Cells
  • Funder: European Commission (EC)
  • Project Code: 737164
  • Funding stream: H2020 | RIA
Communities
FET H2020FET OPEN: FET-Open research and innovation actions
FET H2020FET OPEN: Semiconductor-based Ultrawideband Micromanipulation of CAncer STEm Cells
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Conference object . 2020
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