publication . Conference object . 2020

Micro-transfer-printing for heterogeneous integration

K. Buehler; U. Krieger; Falk Naumann; C. A. Bower; S. Wicht; Z. Li; B. Corbett;
Open Access English
  • Published: 11 Feb 2020
Abstract
Micro-transfer-printing is a key enabling technology for the heterogeneous integration of different materials and devices. The technique is particularly applicable to photonics where a typical system requires diverse arrays of components.
Subjects
free text keywords: Microassembling, Printing, Microtransfer-printing, Heterogeneous integration, Substrates, Surface treatment, Dielectrics, Polymers, III-V semiconductor materials, Transfer printing, Integrated optics, Nanotechnology, Silicon, chemistry.chemical_element, chemistry, Photonics, business.industry, business, Materials science
Funded by
EC| MICROPRINCE
Project
MICROPRINCE
Pilot line for micro-transfer-printing of functional components on wafer level
  • Funder: European Commission (EC)
  • Project Code: 737465
  • Funding stream: H2020 | ECSEL-IA
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ZENODO
Conference object . 2020
Provider: ZENODO
Fraunhofer-ePrints
Conference object . 2019
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