publication . Other literature type . 1995

Electrode contacts on ferroelectric Pb(Zr x Ti1−x )O3 and SrBi2Ta2O9 thin films and their influence on fatigue properties

Lee, J. J.; Thio, C. L.; Desu, Seshu B.;
Open Access English
  • Published: 15 Oct 1995
  • Publisher: American Institute of Physics
Abstract
The degradation (fatigue) of dielectric properties of ferroelectric Pb(ZrxTi1-x)O-3 (PZT) and SrBi2Ta2O9 thin films during cycling was investigated. PZT and SrBi2Ta2O9 thin films were fabricated by metalorganic decomposition and pulsed laser deposition, respectively. Samples with electrodes of platinum (Pt) and ruthenium oxide (RuO2) were studied. The interfacial capacitance (if any) at the Pt/PZT, RuO2/PZT, and Pt/SrBi2Ta2O9 interfaces was determined from the thickness dependence of low-field dielectric permittivity (epsilon(r)) measurements. It was observed that a low epsilon(r) layer existed at the Pt/PZT interface but not at the RuO2/PZT and Pt/SrBi2Ta2O9 in...
Subjects
free text keywords: Lead zirconate titanate, Ferroelectric thin films, Tantalum, Dielectric thin films, Interfacial properties
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