Electrode contacts on ferroelectric Pb(Zr x Ti1−x )O3 and SrBi2Ta2O9 thin films and their influence on fatigue properties

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Lee, J. J.; Thio, C. L.; Desu, Seshu B.;
(1995)
  • Publisher: American Institute of Physics
  • Related identifiers: doi: 10.1063/1.359737
  • Subject: Lead zirconate titanate | Ferroelectric thin films | Tantalum | Dielectric thin films | Interfacial properties

The degradation (fatigue) of dielectric properties of ferroelectric Pb(ZrxTi1-x)O-3 (PZT) and SrBi2Ta2O9 thin films during cycling was investigated. PZT and SrBi2Ta2O9 thin films were fabricated by metalorganic decomposition and pulsed laser deposition, respectively. Sa... View more
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