publication . Patent . 1997

Flash evaporator

Open Access English
  • Published: 02 Jan 1997
  • Publisher: United States Patent and Trademark Office
  • Country: United States
Abstract
A device and method for flash evaporating a reagent includes an evaporation chamber that houses a dome on which evaporation occurs. The dome is solid and of high thermal conductivity and mass, and may be heated to a temperature sufficient to vaporize a specific reagent. The reagent is supplied from an external source to the dome through a nozzle, and may be supplied as a continuous stream, as a shower, and as discrete drops. A carrier gas may be introduced into the evaporation chamber and create a vortex flow therewithin. After evaporation, the gas vapor may be removed from the evaporation chamber through a regulating valve to a reaction chamber. Another embodim...
Subjects
free text keywords: 392/386, 392/399, B01D1/0082, B01D3/06, C23C16/4481
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Patent . 1997
Provider: VTechWorks
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