Comparison of lead zirconate titanate thin films on ruthenium oxide and platinum electrodes

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Bursill, Les A.; Reaney, Ian M.; Vijay, Dilip P.; Desu, Seshu B.;
(1994)
  • Publisher: American Institute of Physics
  • Related identifiers: doi: 10.1063/1.356388
  • Subject: Lead zirconate titanate | Ferroelectric thin films | Electrodes | Microstructural properties | Thin film structure

High-resolution and bright- and dark-field transmission electron microscopy are used to characterize and compare the interface structures and microstructure of PZT/RuO2/SiO2/Si and PZT/Pt/Ti/SiO2/Si ferroelectric thin films, with a view to understanding the improved fat... View more
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