publication . Article . Other literature type . 1994

comparison of lead zirconate titanate thin films on ruthenium oxide and platinum electrodes

Bursill, Les A.; Reaney, Ian M.; Vijay, Dilip P.; Desu, Seshu B.;
Open Access
  • Published: 01 Feb 1994 Journal: Journal of Applied Physics, volume 75, pages 1,521-1,525 (issn: 0021-8979, eissn: 1089-7550, Copyright policy)
  • Publisher: AIP Publishing
  • Country: United States
Abstract
High-resolution and bright- and dark-field transmission electron microscopy are used to characterize and compare the interface structures and microstructure of PZT/RuO2/SiO2/Si and PZT/Pt/Ti/SiO2/Si ferroelectric thin films, with a view to understanding the improved fatigue characteristics of PZT thin films with RuO2 electrodes. The RuO2/PZT interface consists of a curved pseudoperiodic minimal surface. The interface is chemically sharp with virtually no intermixing of RuO2 and PZT, as evidenced by the atomic resolution images as well as energy dispersive x-ray analysis. A nanocrystalline pyrochlore phase Pb2ZrTiO7-x, x not equal 1, was found on the top surface ...
Subjects
free text keywords: Ferroelectric thin films, Electrodes, Microstructural properties, Thin film structure, Nanocrystalline material, Titanium, chemistry.chemical_element, chemistry, Lead zirconate titanate, chemistry.chemical_compound, Condensed matter physics, Thin film, Nanotechnology, Transmission electron microscopy, Physics, Pyrochlore, engineering.material, engineering, Ruthenium oxide, Composite material, Microstructure
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publication . Article . Other literature type . 1994

comparison of lead zirconate titanate thin films on ruthenium oxide and platinum electrodes

Bursill, Les A.; Reaney, Ian M.; Vijay, Dilip P.; Desu, Seshu B.;