Tuning the Bias Sensing Layer: A New Way to Greatly Improve Metal-Oxide Gas Sensors Selectivity

Conference object English OPEN
Dufour , Nicolas; Chapelle , Audrey; Talhi , Chabane; Blanc , Frédéric; Franc , Bernard; Menini , Philippe; Aguir , Khalifa;
(2013)
  • Publisher: HAL CCSD
  • Subject: Gas Senso | Metal Oxide | Temperature-modulated | Bias-modulated | [ SPI.TRON ] Engineering Sciences [physics]/Electronics

International audience; The effects of bias current in the sensing layer of resistive Metal-Oxide (MOX) sensors toward gases have been investigated. The behavior of a WO3 thin film deposited by sputtering has been studied. In a first time, while the working temperature ... View more
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