Force Measurement with a Piezoelectric Cantilever in a Scanning Force Microscope

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Tansock, J.; Williams, C. C.;
(1992)
  • Publisher: Hosted by Utah State University Libraries
  • Subject: Force Measurement | Piezoelectric Cantilever | Scanning Force Microscope

Detection of surface forces between a tip and sample has been demonstrated with a piezoelectric cantilever in a scanning force microscope (SFM). The use of piezoelectric force sensing is particularly advantageous in semiconductor applications where stray light from conv... View more
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