publication . Article . Other literature type . 1992

Force measurement with a piezoelectric cantilever in a scanning force microscope

J. Tansock; C.C. Williams;
Open Access
  • Published: 01 Jan 1992 Journal: Ultramicroscopy, volume 42-44, pages 1,464-1,469 (issn: 0304-3991, Copyright policy)
  • Publisher: Elsevier BV
  • Country: United States
Abstract
Abstract Detection of surface forces between a tip and sample has been demonstrated with a piezoelectric cantilever in a scanning force microscope (SFM). The use of piezoelectric force sensing is particularly advantageous in semiconductor applications where stray light from conventional optical force-sensing methods can significantly modify the local carrier density. Additionally, the piezoelectric sensors are simple, provide good sensitivity to force, and can be batch fabricated. Our piezoelectric force sensors will be described, the theoretical sensitivity and performance of piezoelectric sensors will be discussed and experimental measurements of sensitivity a...
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free text keywords: Instrumentation, Atomic and Molecular Physics, and Optics, Electronic, Optical and Magnetic Materials, Force Measurement, Piezoelectric Cantilever, Scanning Force Microscope, Atomic force acoustic microscopy, Materials science, Magnetic force microscope, Optics, business.industry, business, Piezoresponse force microscopy, Piezoelectricity, Piezoelectric sensor, Conductive atomic force microscopy, Surface force, Non-contact atomic force microscopy
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