publication . Other literature type . Article . 1992

Force measurement with a piezoelectric cantilever in a scanning force microscope

J. Tansock; C.C. Williams;
Open Access
  • Published: 01 Jan 1992
  • Publisher: Hosted by Utah State University Libraries
  • Country: United States
Abstract
Abstract Detection of surface forces between a tip and sample has been demonstrated with a piezoelectric cantilever in a scanning force microscope (SFM). The use of piezoelectric force sensing is particularly advantageous in semiconductor applications where stray light from conventional optical force-sensing methods can significantly modify the local carrier density. Additionally, the piezoelectric sensors are simple, provide good sensitivity to force, and can be batch fabricated. Our piezoelectric force sensors will be described, the theoretical sensitivity and performance of piezoelectric sensors will be discussed and experimental measurements of sensitivity a...
Subjects
free text keywords: Force Measurement, Piezoelectric Cantilever, Scanning Force Microscope, Instrumentation, Atomic and Molecular Physics, and Optics, Electronic, Optical and Magnetic Materials, Conductive atomic force microscopy, Atomic force acoustic microscopy, Magnetic force microscope, Chemistry, Piezoelectricity, Analytical chemistry, Optics, business.industry, business, Piezoelectric sensor, Non-contact atomic force microscopy, Surface force, Piezoresponse force microscopy
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publication . Other literature type . Article . 1992

Force measurement with a piezoelectric cantilever in a scanning force microscope

J. Tansock; C.C. Williams;