AlN-???????????????? ???????????????? ?????????????? ????????????????-???????????????? ?????????????????? ???? ???????????????????? ????????????????. ?? ???????????????????????????? ?????????????????? ??????????-?????????????????????? ?????????????????????? ????????????????, ?????? ???????????????? ?????????????? ???????????????? ?????????? ?????????????????????? ??????????????????. ?????????????? ?????????????????????? ???????????????? ?????????????????????? (??????) ????????????????, ?????? AlN ?????????? ?????????????????????????????????????? ?????????????????????? ?? ?????????????????? ?????????? ???????????????????????????? 50...100 ????, ?????? ???????? ???????????? ???????????????????????? ?????????????????? 8 ????, ?????????????? ?????????????????????????? ???????????????????? 1,3 ????. ??????????????????????, ?????? ?????????????????????????????? ?????????????????????????? AlN-???????????????? ?????????????????? ???? 11,5 ???? 2,94 ???? ???????? ?????????????????????? ?????????????? ???? 50 ???? ???? 1 ??????. ?????? ???????????????? ???????? ?????????????????????????????? ???????????? ?????????????????????? ?????? 10 ??????, ???????????????? 0,39.

AlN-????????????????, ???????????????? ?????????????? ????????????????-???????????????? ?????????????????? ???? ???????????????????? ??????????????????. ?? ?????????????????????????? ?????????????????? ??????????-?????????????????????? ?????????????????????? ??????????????????????, ???? ???????????????? ?????????????? ???????????????? ???????????????? ???????????????????? ??????????????????. ?????????????? ?????????????????? ???????????????? ?????????????????????? (??????) ????????????????, ???? AlN ?????? ?????????????????????????????? ???????????????? ?? ?????????????????? ?????????? ?????????????????? 50...100 ????, ?????? ?????????? ???????????? ???????????????????????? ?????????????? 8 ????, ?????????????? ???????????????????? ?????????????????? 1,3 ????. ??????????????????????, ???? ???????????????????????? ?????????????????????? AlN-???????????????? ???????????????????? ?????? 11,5 ???? 2,94 ???? ???????????????????? ?????????????? ?????? 50 ???? ???? 1 ??????. ?????? ???????????????? ???????? ?????????????????????????? ?????????? ?????????????????????????????? ?????? 10 ?????? ?? ?????????????? 0,39.

AlN coating is received by the method of the vacuum-arc deposition on silicon substrate. It is shown with the use of raster ion-electronic microscopy that coating of nitride aluminum has a wavy structure. It is shown by the method of scanning probe microscopy (SPM) that AlN has a polycrystalline surface with the sizes of grains of approximately 50...100 nm, the height of nanoledges arrives at 8 nm, the degree of roughness makes 1.3 nm. It is determined that the inductivity of AlN coating reduces from 11.5 to 2.94 with increasing of frequency from 50 Hz to 1 MHz. The peak of the dielectric loss tangent observed at 10 kHz arriving 0.39.