Multimodal sensing and imaging technology by integrated scanning electron, force, and nearfield microwave microscopy and its application to submicrometer studies
Hänßler, Olaf C.
Computer science, internet
The work covers a multimodal microscope technology for the analysis, manipulation and transfer of materials and objects in the submicrometer range. An atomic force microscope (AFM) allows imaging of the surface topography and a Scanning Microwave Microscope (SMM) detects electromagnetic properties, both operating in a Scanning Electron Microscope (SEM). The described technology demonstrator allows to observe the region-of-interest live with the SEM, while at the same time a characterization with interacting evanescent near-field microwaves and intermolecular forces takes place.