Multimodal sensing and imaging technology by integrated scanning electron, force, and nearfield microwave microscopy and its application to submicrometer studies

Doctoral thesis OPEN
Hänßler, Olaf C. (2018)
  • Subject: Computer science, internet

The work covers a multimodal microscope technology for the analysis, manipulation and transfer of materials and objects in the submicrometer range. An atomic force microscope (AFM) allows imaging of the surface topography and a Scanning Microwave Microscope (SMM) detects electromagnetic properties, both operating in a Scanning Electron Microscope (SEM). The described technology demonstrator allows to observe the region-of-interest live with the SEM, while at the same time a characterization with interacting evanescent near-field microwaves and intermolecular forces takes place.
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