Multimodal sensing and imaging technology by integrated scanning electron, force, and nearfield microwave microscopy and its application to submicrometer studies

Doctoral thesis OPEN
Hänßler, Olaf C.;
(2018)
  • Subject: Computer science, internet

The work covers a multimodal microscope technology for the analysis, manipulation and transfer of materials and objects in the submicrometer range. An atomic force microscope (AFM) allows imaging of the surface topography and a Scanning Microwave Microscope (SMM) detect... View more
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