publication . Article . 2013

A dual-channel gas chromatography method for the quantitation of low and high concentrations of NF3 and CF4 to study membrane separation of the two compounds

Branken, D.J.; Le Roux, J.P.; Krieg, H.M.; Lachmann, G.;
Open Access English
  • Published: 01 Jan 2013
  • Publisher: ELSEVIER
  • Country: Bangladesh
Abstract
A dual-channel gas chromatographic method is described in this paper that can be conveniently used for quantitation of NF3/CF4 mixtures with a thermal conductivity detector (TCD) on one channel for the quantitation of high-concentrations, and a pulsed discharge helium ionization detector (PDHID) on a second channel for the quantitation of low concentrations. It is shown that adequate separation is achieved on both channels with this dual single-column setup in which column switching as used for NF3/CF4 analysis in industrial chromatographic methods are not required, thus yielding an effective analysis method for laboratory-scale investigations. In addition, the ...
Subjects
free text keywords: NF3 quantitation, CF4 quantitation, separation of NF3 and CF4, pulsed discharge helium ionization, super Q
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