A dual-channel gas chromatography method for the quantitation of low and high concentrations of NF3 and CF4 to study membrane separation of the two compounds

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Branken, D.J.; Le Roux, J.P.; Krieg, H.M.; Lachmann, G.;
  • Publisher: ELSEVIER
  • Subject: NF3 quantitation | CF4 quantitation | separation of NF3 and CF4 | pulsed discharge helium ionization | super Q

A dual-channel gas chromatographic method is described in this paper that can be conveniently used for quantitation of NF3/CF4 mixtures with a thermal conductivity detector (TCD) on one channel for the quantitation of high-concentrations, and a pulsed discharge he... View more
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