Single-mode waveguides with SU-8 polymer core and cladding for MOEMS applications
Nordström, Maria; Zauner, Dan; Boisen, Anja; Hübner, Jörg;
- Journal: volume 25,pages1,284-1,289issn: 0733-8724
- Publisher copyright policies & self-archiving
Related identifiers: - Subject: single-mode | SU-8 | Low stress | waveguides
Fabrication and optical characterization of singlemode polymeric embedded waveguides are performed. A specific material combination (SU-8 2005 as core and the modified SU-8 mr-L 6050XP as cladding) is chosen in order to obtain a small refractive index difference for sin... View more
Share - Bookmark
- Download from