publication . Article . 2007

Single-Mode Waveguides With SU-8 Polymer Core and Cladding for MOEMS Applications

Anja Boisen; Maria Nordström; Jörg Hübner; Dan A. Zauner;
Open Access English
  • Published: 01 Jan 2007
  • Country: Denmark
Abstract
Fabrication and optical characterization of single-mode polymeric embedded waveguides are performed. A specific material combination (SU-8 2005 as core and the modified SU-8 mr-L 6050XP as cladding) is chosen in order to obtain a small refractive index difference for single-mode propagation combined with the conventional fabrication method UV lithography to facilitate the integration of different types of optical detection methods on lab-on-a-chip systems. We analyze the behavior of the refractive index and carefully observe how the value of the refractive index can be tailored during processing. We show that we can fabricate waveguides with an index difference ...
Subjects
free text keywords: single-mode, SU-8, Low stress, waveguides, Optics, business.industry, business, Cladding (metalworking), Single-mode optical fiber, Step-index profile, Waveguide, law.invention, law, Materials science, Waveguide (optics), Photolithography, Refractive index, Cladding (fiber optics)
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