Single-mode waveguides with SU-8 polymer core and cladding for MOEMS applications

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Nordström, Maria; Zauner, Dan; Boisen, Anja; Hübner, Jörg;

Fabrication and optical characterization of singlemode polymeric embedded waveguides are performed. A specific material combination (SU-8 2005 as core and the modified SU-8 mr-L 6050XP as cladding) is chosen in order to obtain a small refractive index difference for sin... View more
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