Effective medium approximation of anisotropic lamellar nanogratings based on Fourier factorization

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Foldyna, Martin ; Ossikovski, Razvigor ; De Martino, Antonello ; Drevillon, Bernard ; Postava, Kamil ; Ciprian, Dalibor ; Pištora, Jaromír ; Watanabe, Koki (2006)
  • Publisher: Optical Society of America
  • Related identifiers: doi: 10.1364/OE.14.003114
  • Subject: anisotropic optical materials | periodic nanostructures | gratings | ellipsometry and polarimetry | diffraction gratings | materials and process characterization
    arxiv: Physics::Optics

Anisotropic lamellar sub-wavelength gratings (nanogratings) are described by Effective Medium Approximation (EMA). Analytical formulas for effective medium optical parameters of nanogratings from arbitrary anisotropic materials are derived using approximation of zeroorder diffraction mode. The method is based on Rigorous Coupled Wave Analysis (RCWA) combined with proper Fourier factorization method. Good agreement between EMA and the rigorous model is observed, where slight differences are explained by the influence of evanescent higher Fourier harmonics in the nanograting.
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