Plasma basic concepts and nitrogen containing plasmas

Part of book or chapter of book English OPEN
Sanz Lluch, M. del Mar ; Tanarro, Isabel (2007)
  • Publisher: Otros Centros UPM
  • Subject: Materiales

Basic concepts related to plasmas are described as well as the typical characterization methods currently available. A brief overview about some plasma applications is given, but focusing on plasma used in material processing mainly devoted to the microelectronics indus... View more
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