publication . Part of book or chapter of book . 2007

Plasma basic concepts and nitrogen containing plasmas

Sanz Lluch, M. del Mar; Tanarro, Isabel;
Open Access English
  • Published: 01 Jan 2007
  • Publisher: Otros Centros UPM
  • Country: Spain
Basic concepts related to plasmas are described as well as the typical characterization methods currently available. A brief overview about some plasma applications is given, but focusing on plasma used in material processing mainly devoted to the microelectronics industry. Finally, specific applications related to plasma-assisted MBE for nitrides and dilute nitrides are given, showing some interesting research works performed to that purpose, and giving the usual characterization techniques commonly used in such processes.
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Part of book or chapter of book . 2007

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