Plasma basic concepts and nitrogen containing plasmas

Part of book or chapter of book English OPEN
Sanz Lluch, M. del Mar; Tanarro, Isabel;
  • Publisher: Otros Centros UPM
  • Subject: Materiales

Basic concepts related to plasmas are described as well as the typical characterization methods currently available. A brief overview about some plasma applications is given, but focusing on plasma used in material processing mainly devoted to the microelectronics indus... View more
  • References (9)

    Lieberman, M.A., Lichtenberg A.J.: Principles of Plasma Discharges and Materials Processing, John Wiley & Sons, Inc, New York, 1994.

    Grill, A., Cold Plasma in Materials Fabrication From Fundamental to Applications, IEEE press, New York, 1993.

    Chapman, B.N., Glow discharge processes. John Wiley and Sons. New York, 1980 Castillo, M., Herrero, V. J., Mendez, I., Tanarro, I., Plasma Sources Sci.

    Tech. 13, 343 (2004) Atkinson, R.; Baulch, D. L.; Cox, R. A.; Hampson, Jr. R. F.; Kerr, J. A.; Rossi, M. J.; Troe, J.; J. Phys. Chem. Ref. Data 28, 191 (1999) Wesley, F.; Herron, J. T.; Hampson, R. F.; Mallard, W. G. Eds., NIST Chemical Kinetics Database; U.S. Department of Comerce: Gaithersburg, MD. (1992) Kossyi, I. A.; Kosstinsky, Y.; Matveyev, A. A.; Silakov, V., Plasma Sources Sci. Technol. 1, 207 (1992) Mozetic, M., Cvelbar, U., Vesel, A., Ricard, A., Babic, D., Poberaj, I., J.

    Appl. Phys. 97, Art. No. 103308 (2005) Lochte-Holtgreven, W., Plasma Diagnostics, American Vacuum Society Classics, AIP, Woodbury, NY., 1995 Coburn, J. W., and Chen, M., J. Appl. Phys., 51, 3134 (1980) Mendez, I., Gordillo-Vazquez, F. J., Herrero, V. J., Tanarro, I., J. Phys.

    Chem. A, 110,6060(2006) Thorne, A., Litzen, U., Johansson, S., Spectrophysics, Principles and Applications, Springer, Berlin, 1999 Tanarro, I., Sanz, M.M., Bermejo, D., Domingo, C , Santos, J., Domenech, J. L., J. Phys. Chem. 98, 5862 (1994) Tanarro, I., Sanz, M.M., Bermejo, D., Domingo, C , Santos, J., J. Chem.

    Phys.100, 238 (1994) Demtroder, W., Laser Spectroscopy: Basic Concepts and Instrumentation, Springer-Verlag, Berlin, 2003.

    Demidov, V. I., Ratynskaia, S. V., Rypdal, K., Rev. Sci. Instrum., 73, 3409 (2002) Dawson, P.E., ed., Quadrupole Mass Spectrometry and its Applications, American Vacuum Society Classics, AIP Press, Woodbury, 1995 Castillo, M., Mendez, I., Islyaikin, A. M., Herrero, V. J., Tanarro, I., J.

    Phys. Chem. A, 109, 6255 (2005) Morimoto,T., Ansari, S. G., Yoneyama, K., Nakajima, T., Masuda, A., Matsumura, H., Nakamura, M., Umemoto, H., Jap. J. Appl. Phys., 45, 961 (2006) Sanz, M. M., Abad, L., Herrero, V. J., Tanarro, I., J. Appl. Phys., 71, 5372 (1992)

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