publication . Part of book or chapter of book . 2007

Plasma basic concepts and nitrogen containing plasmas

Sanz Lluch, M. del Mar; Tanarro, Isabel;
Open Access English
  • Published: 01 Jan 2007
  • Publisher: Otros Centros UPM
  • Country: Spain
Abstract
Basic concepts related to plasmas are described as well as the typical characterization methods currently available. A brief overview about some plasma applications is given, but focusing on plasma used in material processing mainly devoted to the microelectronics industry. Finally, specific applications related to plasma-assisted MBE for nitrides and dilute nitrides are given, showing some interesting research works performed to that purpose, and giving the usual characterization techniques commonly used in such processes.
Subjects
free text keywords: Materiales
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Part of book or chapter of book . 2007

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