Capacitive MEMS-based sensors: thermo-mechanical stability and charge trapping

Doctoral thesis English OPEN
van Essen, Martin Cornelis;
  • Publisher: University of Twente
  • Subject: IR-60461

Micro-Electro Mechanical Systems (MEMS) are generally characterized as miniaturized systems with electrostatically driven moving parts. In many cases, the electrodes are capacitively coupled. This basic scheme allows for a plethora of specifications and functionality. T... View more
  • References (4)

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    [3] J. D. Jackson, “Classical Electrodynamics 3rd edition”, John Wiley & Sons, New York, USA (1998)

    [4] E. Philippow, “Grundlagen der Elektrotechnik”, Hüthig Heidelberg (1989)

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