Hydrogen interactions with silicon-on-insulator materials

Doctoral thesis English OPEN
Rivera de Mena, A.J.;
(2003)
  • Publisher: Delft University Press
  • Subject: silicon-on-insulator | MOS capacitors | thermal desorption | positron annihilation | hydrogen | carrier injection

The booming of microelectronics in recent decades has been made possible by the excellent properties of the Si/SiO2 interface in oxide on silicon systems.. This semiconductor/insulator combination has proven to be of great value for the semiconductor industry. It has ma... View more
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