Controlled formation of anatase and rutile TiO2 thin films by reactive magnetron sputtering

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Rafieian, Damon; Ogieglo, Wojciech; Savenije, T.J.; Lammertink, Rob G H;

<p>We discuss the formation of TiO<sub>2</sub> thin films via DC reactive magnetron sputtering. The oxygen concentration during sputtering proved to be a crucial parameter with respect to the final film structure and properties. The initial deposition provided amorphous... View more
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