publication . Patent . 1994


Hemmes, K.; WIND, M.M.; Lepoole, R.; Habing, P.E.;
Open Access English
  • Published: 01 Jan 1994
  • Publisher: European Patent Office
  • Country: Netherlands
Abstract of WO 9416310 (A1) Ellipsometer comprising at least a Zeeman laser (Z) to generate two beams (g1, g2) which are slightly shifted in frequency and (after transmission through a birefringent crystal (quarter-wave plate)) are both polarized linearly but perpendicular to one another, a non-polarizing beam splitter (N) downstream of which a working beam (g'm2) mofidied by a sample (S) interferes with a reference beam (g1), a unit (W) for separating two orthogonal (p- and s-) components of the interference beam thus composed and providing two a.c. voltages (V1, V2) corresponding thereto, polarization means (G1, G2) being provided to adjust the polarization di...
arXiv: Physics::Accelerator Physics
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Patent . 1994
Provider: NARCIS
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