Precision in harsh environments

Article English OPEN
French, P.; Krijnen, G.; Roozeboom, F.;
  • Publisher: Nature
  • Subject: IR-103449 | micro/nano-fabrication technology | sensors | atomic layer deposition | harsh environments | METIS-321715 | Precision | packaging | EWI-27728

Microsystems are increasingly being applied in harsh and/or inaccessible environments, but many markets expect the same level of functionality for long periods of time. Harsh environments cover areas that can be subjected to high temperature, (bio)-chemical and mechanic... View more
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