Precision in harsh environments

Article English OPEN
French, P.; Krijnen, G.; Roozeboom, F.;
(2016)
  • Publisher: Nature
  • Subject: IR-103449 | micro/nano-fabrication technology | sensors | atomic layer deposition | harsh environments | METIS-321715 | Precision | packaging | EWI-27728

Microsystems are increasingly being applied in harsh and/or inaccessible environments, but many markets expect the same level of functionality for long periods of time. Harsh environments cover areas that can be subjected to high temperature, (bio)-chemical and mechanic... View more
  • References (115)
    115 references, page 1 of 12

    1 Allen MG. Diode laser absorption sensors for gas-dynamic and combustion flows. Measurement Science and Technology 1998; 9: 545-562.

    2 Zhu Y, Huang Z, Shen F et al. Sapphire-fiber-based white-light interferometric sensor for high-temperature measurements. Optics Letters 2005; 30: 711-713.

    3 Giallorenzi TG, Burcaro JA, Dandridge A et al. Optical-fiber sensors challenge the competition: Resistance to corrosion and immunity to interference head the list of benefits in detecting stimuli ranging from pressure to magnetism. IEEE Spectrum 1986; 23: 44-50.

    4 George SM. Atomic layer deposition: an overview. Chemical Reviews 2010; 110: 111-131.

    5 Poodt P, Cameron DC, Dickey E et al. Spatial atomic layer deposition: A route towards further industrialization of ALD. Journal of Vacuum Science & Technology A 2012; 30: 010802.

    6 Harris GL (ed). Properties of Silicon Carbide. INSPEC Publication, Institute of Electrical Engineers, Stevenage, UK, 1995.

    7 Sarro PM. Silicon Carbide as a new MEMS material. Sensors & Actuators A 2000; 82: 210-218.

    8 Yoshida S, Suzuki J. High-temperature reliability of GaN electronic device. Proceedings of the Materials Research Society Symposium 2000. Cambridge University Press, Cambridge, UK, 1999.

    9 Neudeck P, Okojie RS, Chen L. High-temperature electronics-a role for wide bandgap semiconductors? Proceedings of the IEEE 2002; 90: 1065-1076.

    10 Zaitsev AM, Burchard M, Meijer J et al. Diamond pressure and temperature sensors for high-pressure high-temperature applications. Physica Status Solidi (A) 2001; 185: 59-64.

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