Fabrication of PureGaB Ge-on-Si photodiodes for well-controlled 100-pA-level dark currents

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Sammak, A. ; Aminian, M. ; Qi, L. ; De Boer, W.B. ; Charbon, E. ; Nanver, L.K. (2014)
  • Publisher: Electrochemical Society

The selective epitaxial growth of Ge-on-Si followed by in-situ deposition of a nm-thin Ga/B layer stack (PureGaB) has previously been shown to be a robust CMOS-compatible process for fabrication of Ge-on-Si photodiodes. In this paper, strategies to improve the control a... View more
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