Silicon Nanowire Field-effect Chemical Sensor

Doctoral thesis OPEN
Chen, S.;
  • Publisher: University of Twente
  • Subject: IR-78233 | METIS-281587 | EWI-20874

This thesis describes the work that has been done on the project “Design and optimization of silicon nanowire for chemical sensing‿, including Si-NW fabrication, electrical/electrochemical modeling, the application as ISFET, and the build-up of Si- NW/LOC system for aut... View more
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