publication . Doctoral thesis . 2011

Silicon Nanowire Field-effect Chemical Sensor

Songyue Chen;
Open Access
  • Published: 13 Oct 2011
  • Country: Netherlands
Abstract
This thesis describes the work that has been done on the project “Design and optimization of silicon nanowire for chemical sensing”, including Si-NW fabrication, electrical/electrochemical modeling, the application as ISFET, and the build-up of Si- NW/LOC system for automatic sample delivery. A novel top-down fabrication technique was presented for single-crystal Si-NW fabrication realized with conventional microfabrication technique. High quality triangular Si-NWs were made with high wafer-scale yield and scalable lateral dimensions down to 10 – 20 nm and lengths up to 100 m. The thick microscale electrical contact regions formed a continuous layer of single c...
Subjects
free text keywords: IR-78233, METIS-281587, EWI-20874, Microfabrication, Field effect, Nanotechnology, Ohmic contact, Gate oxide, Fabrication, ISFET, Electrical contacts, Materials science, Electrical measurements
Related Organizations

P. Bertone, M. Snyder, FEBS J. 272, 5400-5411 (2005).

P. Yager, T. Edwards, E. Fu, K. Helton, K. Nelson, M. R. Tam, B. H. Weigl, Nature 442, 412-418 (2006).

J. Homola, S. S. Yee, G. Gauglitz, Sensor. Actuat. B 54, 3-15 (1999).

D. Grieshaber, R. MacKenzie, J. Voros, E. Reimhult, Sensors 8, 1400-1458 (2008).

Y. Cui, Q. Q. Wei, H. K. Park, C. M. Lieber, Science 293, 1289-1292 (2001).

Bhattacharya, L. Conforti, R. K. Narayan, W. S. Ball, M. J. Schulz, Nano Today 2, 30-37 (2007).

Guntherodt, C. Gerber, J. K. Gimzewski, Science 288, 316-318 (2000).

R. Beckman, E. Johnston-Halperin, Y. Luo, J. E. Green, J. R. Heath, Science 310, 465-468 (2005).

D. R. Kim, C. H. Lee, X. L. Zheng, Nano Lett. 9, 1984-1988 (2009).

▪ S. Chen, J.G. Bomer, W.G. van der Wiel, E.T. Carlen, and A. van den Berg, Top-Down Fabricated Single Crystal Silicon Nanowires for Biosensing, Nano Bio Tech Conference, Montreux, Switzerland, 2009. (Best poster prize) ▪ S. Chen, J.G. Bomer, W.G. van der Wiel, E.T. Carlen, A. van den Berg, Simple top-down fabrication of single crystal silicon nanowires, Materials Research Soceity (MRS 2009), Spring Meeting, San Francisco, CA, U.S.A, 2009.

Any information missing or wrong?Report an Issue