Hard amorphous hydrogenated carbon films deposited from an expanding thermal plasma

Conference object English OPEN
Gielen, J.W.A.M.; Sanden, van de, M.C.M.; Kessels, W.M.M.; Schram, D.C.; Gerberich, W.W.; (1997)
  • Subject:
    mesheuropmc: eye diseases

Diamondlike amorphous hydrogenated carbon is deposited from an expanding thermal argon/acetylene plasma. It is observed that the film quality improves with increasing deposition rate. To obtain the best material quality the admixed acetylene flow has to be of comparable... View more
Share - Bookmark

  • Download from
    Repository TU/e via NARCIS (Conference object, 1997)
  • Cite this publication