Hard amorphous hydrogenated carbon films deposited from an expanding thermal plasma

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Gielen, J.W.A.M.; Sanden, van de, M.C.M.; Kessels, W.M.M.; Schram, D.C.; Gerberich, W.W.;
  • Subject:
    mesheuropmc: eye diseases

Diamondlike amorphous hydrogenated carbon is deposited from an expanding thermal argon/acetylene plasma. It is observed that the film quality improves with increasing deposition rate. To obtain the best material quality the admixed acetylene flow has to be of comparable... View more
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