Integrated Temperature Sensors based on Heat Diffusion

Doctoral thesis English OPEN
Van Vroonhoven, C.P.L.;
  • Subject: Electrothermal Filters | temperature sensors | precision sensor readout | Frequency-domain sigma-delta | Thermal Diffusivity | Thermal Delay Line | Phase-domain sigma-delta | Time-to-digital converters | low-offset

This thesis describes the theory, design and implementation of a new class of integrated temperature sensors, based on heat diffusion. In such sensors, temperature is sensed by measuring the time it takes for heat to diffuse through silicon. An on-chip thermal delay can... View more
Share - Bookmark

  • Download from
    TU Delft Repository via NARCIS (Doctoral thesis, 2015)
  • Cite this publication