publication . Other literature type . Doctoral thesis . 2015

Integrated Temperature Sensors based on Heat Diffusion

Van Vroonhoven, C.P.L.;
  • Published: 04 Dec 2015
  • Publisher: Delft University of Technology
  • Country: Netherlands
This thesis describes the theory, design and implementation of a new class of integrated temperature sensors, based on heat diffusion. In such sensors, temperature is sensed by measuring the time it takes for heat to diffuse through silicon. An on-chip thermal delay can be determined by geometry and the thermal diffusivity of silicon, and since the thermal diffusivity of crystalline silicon is strongly temperature-dependent, the thermal delay is also temperature dependent. The sensor structures that measure such delays are known as Electrothermal Filters (ETFs). The field of temperature sensing using ETFs is still relatively unexplored. This thesis expands upon ...
free text keywords: Thermal Diffusivity, Electrothermal Filters, Thermal Delay Line, Phase-domain sigma-delta, Frequency-domain sigma-delta, precision sensor readout, Time-to-digital converters, low-offset, temperature sensors

Y.W. Li, H. Lakdawala, A.Raychowdhury, G. Taylor and K. Soumyanath, “A 1.05V 1.6mW, 0.45°C 3σ Resolution ΣΔ based Temperature Sensor with Parasitic Resistance Compensation in 32nm Digital CMOS Process, IEEE Journal of Solid-State Circuits, 2009.

J. Shor, K. Luria, D. Zilberman, "Ratiometric BJT-based thermal sensor in 32nm and 22nm technologies", ISSCC Digest, pp. 210-212, Feb. 2012. [OpenAIRE]

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