Highly conductive and flexible fiber for textile electronics obtained byextremely low-temperature atomic layer deposition of Pt

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Lee, Jaehong; Yoon, Jaehong; Kim, Hyun Gu; Kang, Subin; Oh, Woo-Suk; Algadi, Hassan; Al-Sayari, Saleh; Shong, Bonggeun; Kim, Soo-Hyun; Kim, Hyungjun; Lee, Taeyoon; Lee, Han-Bo-Ram;
(2016)

Thermal atomic layer deposition (ALD) of metal has generally been achieved at high temperatures of around 300 degrees C or at relatively low temperatures with highly reactive counter reactants, including plasma radicals and O-3, which can induce severe damage to substra... View more
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