Hydrogen molecules and hydrogen-related defects in crystalline silicon

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Fukata, N.; Sasak, S.; Murakami, K.; Ishioka, K.; Nakamura, K. G.; Kitajima, M.; Fujimura, S.; Kikuchi, J.; Haneda, H.;
  • Publisher: The American Physical Society
  • Journal: Physical review B, volume 56, issue 11, pages 6,642-6,647 (issn: 1098-0121)
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  • Subject: 基礎工学・応用物理学
    arxiv: Physics::Atomic Physics

We have found that hydrogen exists in molecular form in crystalline silicon treated with hydrogen atoms in the downstream of a hydrogen plasma. The vibrational Raman line of hydrogen molecules is observed at 4158cm-1 for silicon samples hydrogenated between 180 and 500 ... View more
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