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Journal of Siberian Federal University Engineering & Technologies
Article . 2015 . Peer-reviewed
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Journal of Siberian Federal University Engineering & Technologies
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Национальный агрегатор открытых репозиториев российских университетов (HOPA)
Article . 2015
Data sources: Национальный агрегатор открытых репозиториев российских университетов (HOPA)
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Development and Applications of MEMS Components

descriptionPublicationkeyboard_double_arrow_right Article 01 May 2015Publisher:Siberian Federal UniversityJournal:Journal of Siberian Federal University. Engineering & Technologies, volume 8, pages 290-296 (issn: 1999-494X, eissn: 2313-6057, Copyright policy )
Authors: Levitskiy, Alexey A.; Marinushkin, Pavel S.;

doi: 10.17516/1999-494x-2015-8-3-290-296

Development and Applications of MEMS Components

Abstract

This article provides the results of the MEMS (MicroElectroMechanical Systems) components studies. The design considerations and manufacturing techniques of the silicon-based MEMS components are considered. Results of the experimental characterization of the fabricated prototypes are provided. Furthermore, discussion related to the future development of the MEMS components is also presented

Представлены результаты исследований, связанных с созданием компонентов микроэлектромеханических систем (МЭМС). Рассмотрены конструктивные варианты и технологии изготовления компонентов МЭМС на базе кремниевых микроструктур. Обсуждаются результаты исследований экспериментальных образцов. Рассмотрены пути дальнейшего развития исследований по созданию перспективных компонентов МЭМС

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Keywords

microgyroscopes, SCREAM-технология, pedestrian navigation, пешеходная навигация, microelectromechanical resonators, микрогироскопы, inertial navigation, microelectromechanical systems (MEMS), навигация, SCREAM technology, микроэлектромеханические системы (МЭМС), микроэлектромеханические резонаторы

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selected citations
These citations are derived from selected sources.
This is an alternative to the "Influence" indicator, which also reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Citations provided by BIP!
popularity
This indicator reflects the "current" impact/attention (the "hype") of an article in the research community at large, based on the underlying citation network.
BIP!Popularity provided by BIP!
influence
This indicator reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Influence provided by BIP!
impulse
This indicator reflects the initial momentum of an article directly after its publication, based on the underlying citation network.
BIP!Impulse provided by BIP!
1
Average
Top 10%
Average
gold