
doi: 10.4028/p-4fjglu
In this work, we investigate the static electrical parameters of 1200 V 4H-SiC power diodes with various designs and architectures (Schottky, PiN, and JBS with hexagonal or stripes anode), fabricated on two types of 150 mm substrates (single crystal 4H-SiC reference and 3C-poly silicon carbide based substrates: SmartSiCTM). I(V) measurements are carried out in both reverse and forward modes to assess the impact of designs and substrates. Non-destructive avalanche mode is reached with similar performance (leakage, VAV) observed for both substrates (due to identical drift layers and device structures). All diode designs on SmartSiCTM exhibit a larger current conduction and less resistance in the ohmic regime (compared to bulk), whatever the temperature (up to 200°C). Partitioning model is also proposed for evaluating the substrate contribution on the measured specific resistance and on the observed SmartSiCTM gains.
[CHIM.MATE] Chemical Sciences/Material chemistry, [SPI.NANO] Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics, [SPI.NRJ] Engineering Sciences [physics]/Electric power
[CHIM.MATE] Chemical Sciences/Material chemistry, [SPI.NANO] Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics, [SPI.NRJ] Engineering Sciences [physics]/Electric power
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