Influence of Gas Flow Rate on the Deposition Rate on Stainless Steel 202 Substrates

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M.A. Chowdhury; D.M. Nuruzzaman;
  • Publisher: University of Kragujevac
  • Journal: Tribology in Industry (issn: 0354-8996, eissn: 2217-7965)
  • Publisher copyright policies & self-archiving
  • Subject: Gas flow rate | Deposition rate | Stainless steel 202 | Mechanical engineering and machinery | TJ1-1570

Solid thin films have been deposited on stainless steel 202 (SS 202) substrates at different flow rates of natural gas using a hot filament thermal chemical vapor deposition (CVD) reactor. In the experiments, the variations of thin film deposition rate with the variati... View more
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