publication . Article . 2012

Artificial intelligence system for technical diagnostics of photomasks

Kozin A. A.; Kozina Yu. Yu.;
Open Access English
  • Published: 01 Feb 2012 Journal: Tekhnologiya i Konstruirovanie v Elektronnoi Apparature (issn: 2225-5818, Copyright policy)
  • Publisher: Politehperiodika
Abstract
The developed artificial intelligence system has a high level of noise immunity, so its inclusion in the hardware and software for technical diagnostics of photomasks will reduce the hardware requirements for its execution, and thereby reduce the cost of the complex. As a result it will allow to make a small-scale production profitable.
Subjects
free text keywords: photomask, artificial intelligence system, technical diagnostics, fiducial marks, Electrical engineering. Electronics. Nuclear engineering, TK1-9971
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