Artificial intelligence system for technical diagnostics of photomasks

Article English OPEN
Kozin A. A.; Kozina Yu. Yu.;
(2012)
  • Publisher: Politehperiodika
  • Journal: Tekhnologiya i Konstruirovanie v Elektronnoi Apparature (issn: 2225-5818)
  • Subject: photomask | artificial intelligence system | technical diagnostics | fiducial marks | Electrical engineering. Electronics. Nuclear engineering | TK1-9971

The developed artificial intelligence system has a high level of noise immunity, so its inclusion in the hardware and software for technical diagnostics of photomasks will reduce the hardware requirements for its execution, and thereby reduce the cost of the complex. As... View more
Share - Bookmark