Low Humidity Characteristics of Polymer-Based Capacitive Humidity Sensors

Article English OPEN
Majewski Jacek (2017)
  • Publisher: Sciendo
  • Journal: Metrology and Measurement Systems (issn: 2300-1941)
  • Related identifiers: doi: 10.1515/mms-2017-0048
  • Subject: polymer-based capacitive humidity sensors | low humidity measurement | humidity sensors modelling | Technology | T

Polymer-based capacitive humidity sensors emerged around 40 years ago; nevertheless, they currently constitute large part of sensors’ market within a range of medium (climatic and industrial) humidity 20−80%RH due to their linearity, stability and cost-effectiveness. However, for low humidity values (0−20%RH) that type of sensor exhibits increasingly nonlinear characteristics with decreasing of humidity values. This paper presents the results of some experimental trials of CMOS polymer-based capacitive humidity sensors, as well as of modelling the behaviour of that type of sensor. A logarithmic functional relationship between the relative humidity and the change of sensor output value at low humidity is suggested.
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